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产品信息

SMD-X Series
Sputtering Systems
With the increase in size of LC panels and manufacturing mother glass, manufacturing equipment has also become larger, requiring ever-larger equipment investments. For the past several years, ULVAC has been responding to increasing mother glass sizes by developing new-concept systems to replace the cluster-type systems currently prevalent. ULVAC’s systems support larger substrate sizes while remaining compact and low-priced. The new concepts they employ enable staggered, highly effective investment with low initial outlay.

・Designed primarily to improve investment effectiveness
・Support large substrates (>680mm x 880mm)
・Mechanical tact time of 120 to 130 seconds/substrate
・Applications support various deposition needs
・System Configuration (Standard)
Number of loading/unloading chambers : 2 (with substrate heating mechanism)
Number of transfer chambers : 1
Number of sputter chambers : 2
(1 to 3 cathodes can be mounted, depending on model)
・Options
Substrate transfer devices: 1
・X-models
Model (Maximum substrate sizes supported (mm) )
SMD-850BX (680 x 890)
SMD-850BX3 (680 x 890)
SMD-950X (750 x 950)
SMD-950X3 (750 x 950)
SMD-1200X (1200 x 1300)
SMD-1800X (1500 x 1850)

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